Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water PDF (Adobe DRM) download by Ohmi

Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water

By Ohmi

Routledge
Publication date: November 2017
ISBN: 9781351406437
Digital Book format: PDF (Adobe DRM)

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Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int
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